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Advanced Mechatronics and MEMS Devices (Microsystems Book 23) 🔍
Jörg Eichholz, Torgny Brogårdh (auth.), Dan Zhang (eds.)
Springer-Verlag New York, Microsystems, Microsystems 23, 1, 2013
English [en] · PDF · 7.2MB · 2013 · 📘 Book (non-fiction) · 🚀/lgli/lgrs/nexusstc/scihub/upload/zlib · Save
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__Advanced Mechatronics and MEMS Devices__describes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few.
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scihub/10.1007/978-1-4419-9985-6.pdf
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PdfCompressor 3.1.34
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edited by Dan Zhang
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Zhang, Dan
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Springer New York : Imprint : Springer
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Springer US
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Microsystems -- 23, New York, NY, United States, 2013
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Microsystems, 23, 1st ed. 2013, New York, NY, 2013
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Microsystems, New York, NY, cop. 2013 [i.e. 2012
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Microsystems (Series), 23, New York, NY, ©2013
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United States, United States of America
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metadata comments
MiU
Alternative description
Advanced Mechatronics
and MEMS Devices 3
Preface 5
Contents 7
Contributors 9
Chapter 1: Experience from the Development of a Silicon-Based MEMS Six-DOF Force--Torque Sensor 12
1.1 Introduction 13
1.2 Measurement Concept 13
1.3 Design of MEMS Structure 15
1.4 Design of Transducer Structure 18
1.5 Fabrication of MEMS Chip 20
1.6 Mounting of MEMS chip 21
1.7 Measurement Electronics 25
1.8 Sensor Tests and Calibration 28
1.9 Final Demonstrator 30
1.10 Conclusions 33
References 34
Chapter 2: Piezoelectrically Actuated Robotic End-Effector with Strain Amplification Mechanisms 35
2.1 Introduction 35
2.2 Nested Rhombus Multilayer Mechanism 38
2.2.1 Exponential Strain Amplification of PZT Actuators 38
2.2.2 Prototype Actuator Unit 41
2.2.3 Micromanipulator Design 42
2.2.4 Modular Design of Cellular Actuators 43
2.3 Lumped Parameter Model of Nested Rhombus Strain AmplificationMechanism 44
2.3.1 Two-Port Model of Single-Layer Flexible Rhombus Mechanisms 44
2.3.2 Lumped Parameter Model 46
2.3.3 Muscle-Like Compliance 48
2.4 Control of Compliant Actuators by Minimum Switching Discrete Switching Law 48
2.5 Tweezer-Style Piezoelectric End-Effector 53
2.5.1 Piezoelectric End-Effector for Robotic Surgery and Intervention in MRI 53
2.5.2 Modeling and Design 53
2.5.3 Fabrication and Performance Test 55
2.5.4 Force Sensing 57
2.6 Conclusion 58
Appendix 58
Structural Analysis of Tweezer-Style End-Effector 58
References 60
Chapter 3: Autocalibration of MEMS Accelerometers 63
3.1 Introduction 63
3.2 Sensor Models 65
3.3 Noise Model 71
3.4 Local Gravity Variations 74
3.5 Calibration Procedures 76
3.5.1 Six-Positions Method 77
3.5.2 Extended Six-Positions Method 78
3.5.3 Autocalibration Methods 79
3.5.4 Other Calibration Methods 83
3.6 Results 83
3.6.1 Accuracy of the Estimated Sensor Parameters 85
3.6.2 Evaluation of the Accuracy of the Calibrated Sensor Used as a Tilt Sensor 87
3.6.3 From the Sensitivity Matrix to the Axes Misalignments 93
3.6.4 Calibration of Another Sensor: ADXL330 (Wiimote Accelerometer) 94
3.7 Conclusion 95
3.7.1 Choice of the Sensor Model 95
3.7.2 Modeling the Sensor Noise 95
3.7.3 The Right Value of g 96
3.7.4 Accuracy of the Estimated Parameters 96
3.7.5 Axes Misalignments from Calibration Data 96
References 97
Chapter 4: Miniaturization of Micromanipulation Tools 99
4.1 Introduction 99
4.2 Fabrication 100
4.2.1 Serial Fabrication 100
4.2.2 Batch Fabrication 101
4.3 Applications 102
4.3.1 Imaging Platform 102
4.3.2 Surface Adhesion 103
4.3.2.1 Passive Release 104
4.3.2.2 Active Release 104
4.3.3 Depth Detection 105
4.3.3.1 Depth from Focus 105
4.3.3.2 Touch Sensing 105
4.3.3.3 Shadow-Based Detection 106
4.3.3.4 Stereoscopic SEM Imaging 106
4.3.3.5 Sliding-Based Detection 106
4.4 Conclusion 106
References 107
Chapter 5: Digital Microrobotics Using MEMS Technology 109
5.1 Introduction 109
5.2 Fundamentals of Digital Microrobotics 112
5.2.1 Mechanical Bistable Module 112
5.2.2 Robot Axes Based on Bistable Modules 112
5.2.3 Digital Microrobots 113
5.2.4 Comparison Between Current Microrobots and Digital Microrobots 114
5.3 Design and Characterization of a Mechanical Bistable Module 114
5.3.1 Structure of a Module 115
5.3.2 Dynamic Characteristics 117
5.3.3 Control Strategy 118
5.4 A Digital Microrobot for Ultra High Positioning Resolution 120
5.4.1 Module Combination 120
5.4.2 The DiMiBot Structure 120
5.4.3 Forward and Inverse Kinematics 121
5.4.4 Characteristics of the DiMiBot 124
5.5 Conclusion and Perspectives 125
References 125
Chapter 6: Flexure-Based Parallel-Kinematics Stages for Passive Assembly of MEMS Optical Switches 127
6.1 Introduction 127
6.2 Fiber Insertion Analysis 128
6.2.1 Assembly Errors 128
6.2.2 Problems of Fiber Insertion Operation 129
6.2.2.1 Component Damage 129
6.2.2.2 Fiber Skidding Out of the Grip 131
6.2.3 Fiber Skidding Analysis 131
6.2.4 Contact Force vs. Support Fixture Stiffness 132
6.2.5 Stiffness Requirements for Passive Fiber Insertion 133
6.3 Stiffness of 3-Legged Flexure-Based Parallel Kinematics Stages 136
6.3.1 Stiffness Modeling 136
6.3.2 Case Studies 140
6.3.2.1 RPR Leg Configuration 140
6.3.2.2 RRR Leg Configuration 141
6.4 Design of a 3-Legged Flexure-Based Parallel Kinematics Stage 142
6.4.1 Supporting Leg Configuration 142
6.4.2 Flexure Design 143
6.4.3 FEA Simulation 144
6.5 Experimental Studies 147
6.6 Conclusions 149
References 150
Chapter 7: Micro-Tactile Sensors for In Vivo Measurements of Elasticity 151
7.1 Introduction 151
7.2 Sensing Principles 154
7.2.1 A Spring-Pair Model 154
7.2.2 A More Precise Contact Model 155
7.3 Prototype Micro-Tactile Sensors 157
7.4 Flexible Micro-Tactile Sensors 160
7.5 Ultralow-Cost Sensors for Handheld Operation 164
7.5.1 Sensor Structure and Fabrication Process 165
7.5.2 Estimation Algorithm for Measurement of Capacitance Ratio 167
7.6 Summary 169
References 171
Chapter 8: Devices and Techniques for Contact Microgripping 174
8.1 Introduction 174
8.2 Gripping Techniques with Physical Contact 175
8.2.1 Friction Microgrippers 175
8.2.2 Pneumatic Grippers 176
8.2.3 Adhesive Gripper 177
8.2.4 Phase Changing 178
8.2.5 Electric Grippers 178
8.3 A Case Study: Development of a Variable Curvature Microgripper 179
8.4 Conclusion 184
References 184
Chapter 9: A Wall-Climbing Robot with Biomimetic Adhesive Pedrail* 188
9.1 Introduction 188
9.2 Design of the Climbing-Caterpillar 190
9.2.1 Aim and Requirements 190
9.2.2 A Rough Framework 190
9.2.3 Adding a Tail 192
9.3 Fabrication of Adhesive Array 197
9.4 Prototype and Experiments 198
9.5 Conclusion 199
References 200
Chapter 10: Development of Bioinspired Artificial Sensory Cilia 201
10.1 Introduction 202
10.1.1 Sensory Hairs in Natural World 202
10.1.2 Biological Model of Natural Hair Receptor 202
10.2 Biomimetic Flow Sensor Inspired from Natural Lateral Line 204
10.2.1 Compliant Sensing Material 204
10.2.2 Fabrication of Biomimetic Cupula Receptor 205
10.2.3 Testing Result of Artificial Cupula Receptor 206
10.3 Drawing Artificial Cilia from Polymer Solution 209
10.3.1 Setup of Microfiber Drawing 209
10.3.2 Electrodes Fabrication and Electronic Interface 210
10.3.3 Response to Ambient Disturbance 212
10.4 Conclusion 212
References 213
Chapter 11: Jumping Like an Insect: From Biomimetic Inspiration to a Jumping Minirobot Design 215
11.1 Introduction 216
11.1.1 Small Animals Are Easier to Jump 217
11.1.2 Jumping Helps Improve Robot ́s Moving Ability 218
11.1.3 Control and Energy Consumption 219
11.1.4 Environmental Compatibility 219
11.2 Mechanical Design 219
11.2.1 Saltatorial Legs 219
11.2.2 Jumping Actuation 221
11.2.3 Jumping Robot Prototyping 222
11.3 Jumping like an Insect: Simulation and Testing 224
11.3.1 Working Sequence 224
11.3.2 Jumping Measuring by High Speed Camera 226
11.4 Conclusion 228
References 228
Chapter 12: Modeling and H∞ PID Plus Feedforward Controller Design for an Electrohydraulic Actuator System 230
12.1 Introduction 230
12.2 Modeling of the EHA System 233
12.2.1 Linear Symmetrical Actuator 233
12.2.2 Hydraulic Pump 233
12.2.3 Pump/Actuator Connection and Overall Hydraulic Model 234
12.3 Discrete-Time Robust PI Plus Feedforward Controller with H∞ Performance 237
12.3.1 Transforming the PI Plus Feedforward Controller into a SOFController 238
12.3.2 H∞ Optimization 239
12.4 Simulation Studies and Experimental Test 240
12.4.1 Simulation Study 241
12.4.2 Experimental Test 242
12.5 Conclusions 244
12.6 Nomenclature 245
References 245
Index 247
Preface 5
Contents 7
Contributors 9
Chapter 1: Experience from the Development of a Silicon-Based MEMS Six-DOF Force--Torque Sensor 12
1.1 Introduction 13
1.2 Measurement Concept 13
1.3 Design of MEMS Structure 15
1.4 Design of Transducer Structure 18
1.5 Fabrication of MEMS Chip 20
1.6 Mounting of MEMS chip 21
1.7 Measurement Electronics 25
1.8 Sensor Tests and Calibration 28
1.9 Final Demonstrator 30
1.10 Conclusions 33
References 34
Chapter 2: Piezoelectrically Actuated Robotic End-Effector with Strain Amplification Mechanisms 35
2.1 Introduction 35
2.2 Nested Rhombus Multilayer Mechanism 38
2.2.1 Exponential Strain Amplification of PZT Actuators 38
2.2.2 Prototype Actuator Unit 41
2.2.3 Micromanipulator Design 42
2.2.4 Modular Design of Cellular Actuators 43
2.3 Lumped Parameter Model of Nested Rhombus Strain AmplificationMechanism 44
2.3.1 Two-Port Model of Single-Layer Flexible Rhombus Mechanisms 44
2.3.2 Lumped Parameter Model 46
2.3.3 Muscle-Like Compliance 48
2.4 Control of Compliant Actuators by Minimum Switching Discrete Switching Law 48
2.5 Tweezer-Style Piezoelectric End-Effector 53
2.5.1 Piezoelectric End-Effector for Robotic Surgery and Intervention in MRI 53
2.5.2 Modeling and Design 53
2.5.3 Fabrication and Performance Test 55
2.5.4 Force Sensing 57
2.6 Conclusion 58
Appendix 58
Structural Analysis of Tweezer-Style End-Effector 58
References 60
Chapter 3: Autocalibration of MEMS Accelerometers 63
3.1 Introduction 63
3.2 Sensor Models 65
3.3 Noise Model 71
3.4 Local Gravity Variations 74
3.5 Calibration Procedures 76
3.5.1 Six-Positions Method 77
3.5.2 Extended Six-Positions Method 78
3.5.3 Autocalibration Methods 79
3.5.4 Other Calibration Methods 83
3.6 Results 83
3.6.1 Accuracy of the Estimated Sensor Parameters 85
3.6.2 Evaluation of the Accuracy of the Calibrated Sensor Used as a Tilt Sensor 87
3.6.3 From the Sensitivity Matrix to the Axes Misalignments 93
3.6.4 Calibration of Another Sensor: ADXL330 (Wiimote Accelerometer) 94
3.7 Conclusion 95
3.7.1 Choice of the Sensor Model 95
3.7.2 Modeling the Sensor Noise 95
3.7.3 The Right Value of g 96
3.7.4 Accuracy of the Estimated Parameters 96
3.7.5 Axes Misalignments from Calibration Data 96
References 97
Chapter 4: Miniaturization of Micromanipulation Tools 99
4.1 Introduction 99
4.2 Fabrication 100
4.2.1 Serial Fabrication 100
4.2.2 Batch Fabrication 101
4.3 Applications 102
4.3.1 Imaging Platform 102
4.3.2 Surface Adhesion 103
4.3.2.1 Passive Release 104
4.3.2.2 Active Release 104
4.3.3 Depth Detection 105
4.3.3.1 Depth from Focus 105
4.3.3.2 Touch Sensing 105
4.3.3.3 Shadow-Based Detection 106
4.3.3.4 Stereoscopic SEM Imaging 106
4.3.3.5 Sliding-Based Detection 106
4.4 Conclusion 106
References 107
Chapter 5: Digital Microrobotics Using MEMS Technology 109
5.1 Introduction 109
5.2 Fundamentals of Digital Microrobotics 112
5.2.1 Mechanical Bistable Module 112
5.2.2 Robot Axes Based on Bistable Modules 112
5.2.3 Digital Microrobots 113
5.2.4 Comparison Between Current Microrobots and Digital Microrobots 114
5.3 Design and Characterization of a Mechanical Bistable Module 114
5.3.1 Structure of a Module 115
5.3.2 Dynamic Characteristics 117
5.3.3 Control Strategy 118
5.4 A Digital Microrobot for Ultra High Positioning Resolution 120
5.4.1 Module Combination 120
5.4.2 The DiMiBot Structure 120
5.4.3 Forward and Inverse Kinematics 121
5.4.4 Characteristics of the DiMiBot 124
5.5 Conclusion and Perspectives 125
References 125
Chapter 6: Flexure-Based Parallel-Kinematics Stages for Passive Assembly of MEMS Optical Switches 127
6.1 Introduction 127
6.2 Fiber Insertion Analysis 128
6.2.1 Assembly Errors 128
6.2.2 Problems of Fiber Insertion Operation 129
6.2.2.1 Component Damage 129
6.2.2.2 Fiber Skidding Out of the Grip 131
6.2.3 Fiber Skidding Analysis 131
6.2.4 Contact Force vs. Support Fixture Stiffness 132
6.2.5 Stiffness Requirements for Passive Fiber Insertion 133
6.3 Stiffness of 3-Legged Flexure-Based Parallel Kinematics Stages 136
6.3.1 Stiffness Modeling 136
6.3.2 Case Studies 140
6.3.2.1 RPR Leg Configuration 140
6.3.2.2 RRR Leg Configuration 141
6.4 Design of a 3-Legged Flexure-Based Parallel Kinematics Stage 142
6.4.1 Supporting Leg Configuration 142
6.4.2 Flexure Design 143
6.4.3 FEA Simulation 144
6.5 Experimental Studies 147
6.6 Conclusions 149
References 150
Chapter 7: Micro-Tactile Sensors for In Vivo Measurements of Elasticity 151
7.1 Introduction 151
7.2 Sensing Principles 154
7.2.1 A Spring-Pair Model 154
7.2.2 A More Precise Contact Model 155
7.3 Prototype Micro-Tactile Sensors 157
7.4 Flexible Micro-Tactile Sensors 160
7.5 Ultralow-Cost Sensors for Handheld Operation 164
7.5.1 Sensor Structure and Fabrication Process 165
7.5.2 Estimation Algorithm for Measurement of Capacitance Ratio 167
7.6 Summary 169
References 171
Chapter 8: Devices and Techniques for Contact Microgripping 174
8.1 Introduction 174
8.2 Gripping Techniques with Physical Contact 175
8.2.1 Friction Microgrippers 175
8.2.2 Pneumatic Grippers 176
8.2.3 Adhesive Gripper 177
8.2.4 Phase Changing 178
8.2.5 Electric Grippers 178
8.3 A Case Study: Development of a Variable Curvature Microgripper 179
8.4 Conclusion 184
References 184
Chapter 9: A Wall-Climbing Robot with Biomimetic Adhesive Pedrail* 188
9.1 Introduction 188
9.2 Design of the Climbing-Caterpillar 190
9.2.1 Aim and Requirements 190
9.2.2 A Rough Framework 190
9.2.3 Adding a Tail 192
9.3 Fabrication of Adhesive Array 197
9.4 Prototype and Experiments 198
9.5 Conclusion 199
References 200
Chapter 10: Development of Bioinspired Artificial Sensory Cilia 201
10.1 Introduction 202
10.1.1 Sensory Hairs in Natural World 202
10.1.2 Biological Model of Natural Hair Receptor 202
10.2 Biomimetic Flow Sensor Inspired from Natural Lateral Line 204
10.2.1 Compliant Sensing Material 204
10.2.2 Fabrication of Biomimetic Cupula Receptor 205
10.2.3 Testing Result of Artificial Cupula Receptor 206
10.3 Drawing Artificial Cilia from Polymer Solution 209
10.3.1 Setup of Microfiber Drawing 209
10.3.2 Electrodes Fabrication and Electronic Interface 210
10.3.3 Response to Ambient Disturbance 212
10.4 Conclusion 212
References 213
Chapter 11: Jumping Like an Insect: From Biomimetic Inspiration to a Jumping Minirobot Design 215
11.1 Introduction 216
11.1.1 Small Animals Are Easier to Jump 217
11.1.2 Jumping Helps Improve Robot ́s Moving Ability 218
11.1.3 Control and Energy Consumption 219
11.1.4 Environmental Compatibility 219
11.2 Mechanical Design 219
11.2.1 Saltatorial Legs 219
11.2.2 Jumping Actuation 221
11.2.3 Jumping Robot Prototyping 222
11.3 Jumping like an Insect: Simulation and Testing 224
11.3.1 Working Sequence 224
11.3.2 Jumping Measuring by High Speed Camera 226
11.4 Conclusion 228
References 228
Chapter 12: Modeling and H∞ PID Plus Feedforward Controller Design for an Electrohydraulic Actuator System 230
12.1 Introduction 230
12.2 Modeling of the EHA System 233
12.2.1 Linear Symmetrical Actuator 233
12.2.2 Hydraulic Pump 233
12.2.3 Pump/Actuator Connection and Overall Hydraulic Model 234
12.3 Discrete-Time Robust PI Plus Feedforward Controller with H∞ Performance 237
12.3.1 Transforming the PI Plus Feedforward Controller into a SOFController 238
12.3.2 H∞ Optimization 239
12.4 Simulation Studies and Experimental Test 240
12.4.1 Simulation Study 241
12.4.2 Experimental Test 242
12.5 Conclusions 244
12.6 Nomenclature 245
References 245
Index 247
Alternative description
Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few. This book also: Covers the fundamentals of advanced mechatronics and MEMS devices while also presenting new state-of-the-art methodology and technology used in the application of these devices Presents numerous applications of MEMS technology in robotics, using novel applications of micro-robots based on MEMS design and implementation Uses an extensive number of case studies Advanced Mechatronics and MEMS Devices is an ideal book for engineers,researchers, and graduate students who are interested in mechatronics and MEMS technology
Alternative description
Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few. This book also:Covers the fundamentals of advanced mechatronics and MEMS devices while also presenting new state-of-the-art methodology and technology used in the application of these devicesPresents numerous applications of MEMS technology in robotics, using novel applications of micro-robots based on MEMS design and implementationUses an extensive number of case studiesAdvanced Mechatronics and MEMS Devices is an ideal book for engineers, researchers, and graduate students who are interested in mechatronics and MEMS technology
Alternative description
Front Matter....Pages i-xi
Experience from the Development of a Silicon-Based MEMS Six-DOF Force–Torque Sensor....Pages 1-23
Piezoelectrically Actuated Robotic End-Effector with Strain Amplification Mechanisms....Pages 25-52
Autocalibration of MEMS Accelerometers....Pages 53-88
Miniaturization of Micromanipulation Tools....Pages 89-98
Digital Microrobotics Using MEMS Technology....Pages 99-116
Flexure-Based Parallel-Kinematics Stages for Passive Assembly of MEMS Optical Switches....Pages 117-140
Micro-Tactile Sensors for In Vivo Measurements of Elasticity....Pages 141-163
Devices and Techniques for Contact Microgripping....Pages 165-178
A Wall-Climbing Robot with Biomimetic Adhesive Pedrail....Pages 179-191
Development of Bioinspired Artificial Sensory Cilia....Pages 193-206
Jumping Like an Insect: From Biomimetic Inspiration to a Jumping Minirobot Design....Pages 207-221
Modeling and H ∞ PID Plus Feedforward Controller Design for an Electrohydraulic Actuator System....Pages 223-239
Back Matter....Pages 241-249
Experience from the Development of a Silicon-Based MEMS Six-DOF Force–Torque Sensor....Pages 1-23
Piezoelectrically Actuated Robotic End-Effector with Strain Amplification Mechanisms....Pages 25-52
Autocalibration of MEMS Accelerometers....Pages 53-88
Miniaturization of Micromanipulation Tools....Pages 89-98
Digital Microrobotics Using MEMS Technology....Pages 99-116
Flexure-Based Parallel-Kinematics Stages for Passive Assembly of MEMS Optical Switches....Pages 117-140
Micro-Tactile Sensors for In Vivo Measurements of Elasticity....Pages 141-163
Devices and Techniques for Contact Microgripping....Pages 165-178
A Wall-Climbing Robot with Biomimetic Adhesive Pedrail....Pages 179-191
Development of Bioinspired Artificial Sensory Cilia....Pages 193-206
Jumping Like an Insect: From Biomimetic Inspiration to a Jumping Minirobot Design....Pages 207-221
Modeling and H ∞ PID Plus Feedforward Controller Design for an Electrohydraulic Actuator System....Pages 223-239
Back Matter....Pages 241-249
Alternative description
Advanced Mechatronics and MEMS Devices describes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few.
Alternative description
describes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few.
Erscheinungsdatum: 14.09.2012
Erscheinungsdatum: 14.09.2012
date open sourced
2013-08-01
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